Trichlorosilane CAS#10025-78-2
High thermal stability :
More stable than dichlorosilane at high temperatures.
Solubility in organic solvents :
Easily dissolves in benzene and ether, facilitating chemical processing.
Reactivity with reducing agents :
Can be reduced to silane using lithium aluminum hydride or lithium borohydride, useful in synthesis.
Non-corrosive to dry metals :
Does not corrode iron or stainless steel in anhydrous conditions, ensuring material compatibility.
Product Description of Trichlorosilane (CAS#: 10025-78-2)
Trichlorosilane is a colorless, volatile liquid with a pungent odor at room temperature and pressure. It is highly flammable in air and poses a fire risk even at temperatures below -18℃. Upon exposure to open flames, it burns vigorously, producing red flames and white smoke, and reacts with oxygen to generate SiO₂, HCl, and Cl₂ (SiHCl₃ + O₂ → SiO₂ + HCl + Cl₂). Its vapor forms explosive mixtures with air across a wide concentration range, which can detonate violently when heated.
Compared to dichlorosilane, trichlorosilane exhibits superior thermal stability but decomposes at 900℃ into toxic fumes of HCl, Cl₂, and silicon. It reacts explosively with water (2SiHCl₃ + 3H₂O → (HSiO)₂O + 6HCl), releasing smoke, and decomposes in alkaline solutions to produce hydrogen (SiHCl₃ + 3NaOH + H₂O → Si(OH)₄ + 3NaCl + H₂). Contact with oxidizers may trigger explosive reactions.
Trichlorosilane reacts with acetylene and hydrocarbons to form chlorosilanes (e.g., SiHCl₃ + CH≡CH → CH₂CHSiCl₃). In the presence of reducing agents like lithium aluminum hydride or lithium borohydride, it can be converted into silane. Physical shock to its container may cause ignition.
It is soluble in organic solvents such as benzene and ether. Anhydrous trichlorosilane does not corrode iron or stainless steel, but moisture exposure leads to corrosion of most metals.
Trichlorosilane Chemical Properties
Melting point | -127 °C |
Boiling point | 32-34 °C(lit.) |
density | 1.342 g/mL at 25 °C(lit.) |
vapor density | 1 (vs air) |
vapor pressure | 9.75 psi ( 20 °C) |
refractive index | 1.4-1.402 |
Fp | 7 °F |
storage temp. | Refrigerator |
solubility | Soluble in benzene, ether, heptane, chloroform and carbon tetrachloride. |
form | Liquid |
Specific Gravity | 1.342 |
color | Colorless |
Odor | Sharp, choking, like hydrochloric acid. |
explosive limit | 70% |
Water Solubility | decomposes |
Sensitive | Air & Moisture Sensitive |
Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
Merck | 14,9646 |
Stability: | Stable, but extremely flammable. Pyrophoric - spontaneously ignites in air. Explosion hazard in air - note wide explosion limits. Reacts violently with water. Incompatible with moisture, acids, bases, strong oxidizing agents, alcohols, amines. |
InChIKey | ZDHXKXAHOVTTAH-UHFFFAOYSA-N |
CAS DataBase Reference | 10025-78-2(CAS DataBase Reference) |
NIST Chemistry Reference | Trichlorosilane(10025-78-2) |
EPA Substance Registry System | Trichlorosilane (10025-78-2) |
Safety Information
Hazard Codes | F+,C |
Risk Statements | 12-14-17-20/22-29-35 |
Safety Statements | 16-26-36/37/39-43-45-7/9-43A |
RIDADR | UN 1295 4.3/PG 1 |
WGK Germany | 1 |
RTECS | VV5950000 |
F | 4.5-21-31 |
TSCA | Yes |
HazardClass | 4.3 |
PackingGroup | I |
HS Code | 28530090 |
Hazardous Substances Data | 10025-78-2(Hazardous Substances Data) |
Toxicity | LD50 orally in rats: 1.03 g/kg (Smyth) |
Product Application of Trichlorosilane (CAS#: 10025-78-2)
Trichlorosilane serves as a key raw material for synthesizing polymer-based organic silicon compounds. Additionally, it is utilized in industrial instrumentation applications.
Furthermore, it acts as a primary precursor for the production of organic silicon compounds and functions as the foundational raw material in the manufacturing process of polysilicon.



